Comparison of Dispatching Rules for Semicondutor Manufacturing Using Large Facility Models

نویسندگان

  • Manfred Mittler
  • Alexander K. Schoemig
چکیده

In this paper, we present a comparison of five dispatching rules that aim to reduce the mean and the variance of cycle times. The performance of the dispatch rules is evaluated using simulation results for two large semiconductor wafer fabrication facilities. The results show that which dispatch rule achieves the best results depends on the fab, on the load of the fab and on the product.

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تاریخ انتشار 1999